Journals:

http://jjap.ipap.jp/online/  - Japanese Journal of Applied Physics

http://sst.pennnet.com/home.cfm  - Solid State Technology

http://www.samcointl.com/prod/RIE-1C/index.html     -     reactive ion etching system

http://www.memsguide.com/MEMSequipments-Etchingprocess_dry_RIE.htm     -     Microelectromechanical Systems  ( MEMS)   guide

http://plasmalab.berkeley.edu/publications/wengrow/application_of_a_pulsed_rf-driven_multicusp_source.pdf

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