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Collection of links
to journals and sites, containing information on plasma
and vacuum technology, reactive ion etching.
Journals:
http://jjap.ipap.jp/online/
-
Japanese Journal of Applied Physics
http://sst.pennnet.com/home.cfm
- Solid State Technology
http://www.samcointl.com/prod/RIE-1C/index.html
- reactive ion etching
system
http://www.memsguide.com/MEMSequipments-Etchingprocess_dry_RIE.htm
- Microelectromechanical Systems (
MEMS) guide
http://plasmalab.berkeley.edu/publications/wengrow/application_of_a_pulsed_rf-driven_multicusp_source.pdf
sites on plasma technology, sites
on vacuum technology, information on plasma technology, information
on reactive ion etching, articles on plasma, plasma, plasma technology,
vacuum technology, vacuum, journals on plasma, reactive ion etching,
sites on reactive ion etching, links to sites on plasma, links on
vacuum, plasma science, vacuum science, sites, etching, ion,
links, links to journals on plasma, collection of links to sites
on plasma, catalog of links to sites on plasma, list of links to
sites on plasma, information on plasma, information on vacuum, mems,
micro-electromechanical systems, micro-electromechanical, reactive ion etching systems, guide
information on plasma and vacuum technology, reactive ion
etching
sites on plasma technology, sites on
vacuum technology, information on plasma technology, information
on reactive ion etching, articles on plasma, plasma, plasma technology,
vacuum technology, vacuum, journals on plasma, reactive ion etching,
sites on reactive ion etching, links to sites on plasma, links on
vacuum, plasma science, vacuum science, sites, etching, ion,
links, links to journals on plasma, collection of links to sites
on plasma, catalog of links to sites on plasma, list of links to
sites on plasma, information on plasma, information on vacuum, mems,
micro-electromechanical systems, micro-electromechanical, micro
electromechanical, reactive ion etching systems, guide
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